-Resolution of 1280x800 or higher is recommended. If you have trouble viewing the page, go to "View/Zoom/Zoom out" in your browser window.

-This is the beta version of the new LAVA website and is still under construction. It has new features including additional applications and presentations with sound. Please provide feedback to lavaTCAD@gmail.com, especially on the usefullness of .amr files and a possibility of a mobile version of the website.


LAVA is a web technology that allows lithographers around the globe to access lithography simulators remotely through the Internet.


 

     

Kenny K.H. Toh


 

Our web server provides a fast and stable simulation server, combining our best resources and latest codes for lithography simulation. Currently, we have 5 simulators online, SPLAT, SAMPLE-2D, SAMPLE-3D, TEMPEST, and SIMPL, which have been developed at UC Berkeley. Short Descriptions of the Simulators

 


 

  

   

   

    

    

    

    

 

 

   

    

    

    

    

    

 

 



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