Simulators:

     SAMPLE-2D    : two dimensional lithography simlator   

     SAMPLE-3D     : three dimensional lithography

     SPLAT                 : aerial image, thin-films, high NA

     • TEMPEST          : reflective notching, dynamic bleaching, phase shift masks

     • TEMPEST 5.1  : in Postscript format (301Kb)

     • SIMPLer             : a minimal version of SIMPL made for EE40

     • SIMPL GL           : a new version of SIMPL with 3D features made for educational

   and scientific use

     • NETch                 : an extension to the Etch program in Sample-3D

 

Web User Interface:

     •LAVA

 

For best results when using the applets on our web site, we recommend Internet Explorer 5.0 version or better. Netscape 4.06 version or better should work, but the user interface is designed and is tested best with explorer. Some of our applets may work with older versions of these browsers, but some will not.