Presentations


Table of Contents:

This page is still under construction, not all sound files are up yet. All the following materials are intended for personal use.

Please send feedback to lavaTCAD@gmail.com if you are interested in using the .amr format or we will drop it.


 

Topical Module Presentations
 
PDF
Audio
Lectures
MP3
AMR
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Module_Index.pdf
Module_Index.mp3

Module_Index.amr

 i) Module Index Overview                     (2:31 min)
   
Basic Projection Printing Moduels (BPP)
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M_BPP_1.pdf
M_BPP_1A.mp3

M_BPP_1A.amr

 ii) BPP-1A: Resolution & Depth of Focus

                                                                  (12:18 min)

 

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     BPP-1B                                        (14:57 min)

M_BPP_1B.mp3

M_BPP_1B.amr

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M_BPP_2.pdf
M_BPP_2.mp3

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 iii) BPP-2: Bragg Condition & Mask Scattering

                                                       (27:13 min)

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M_BPP_3.pdf
M_BPP_3.mp3

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 iv) BPP-3: Electric Fields and Intensity (28:19 min)
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M_BPP_4.pdf
M_BPP_4.mp3

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 v) BPP-4: Coupling and Standing Waves in      Resist                                         (44:18 min)
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M_BPP_5.pdf
M_BPP_5.mp3

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 vi) BPP-5: Patial Coherence                   (19:28 min)
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M_BPP_6.pdf

M_BPP_6.mp3

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 vii) BPP-6: Integral Representation of Fresnal       and Fraunhoffer                                (19:36 min)
   
Advanced Issues and Technology (AIT)
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M_AIT_1.pdf
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 viii) AIT-1:LER and CAR
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M_AIT_2.pdf
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 viiii) AIT-2: Resolution Enhancement and PSM
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M_AIT_3.pdf
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 x) AIT-3: Small Features and Defects
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M_AIT_4.pdf
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 xi) AIT-4: Aberrations
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M_AIT_5.pdf
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 xii) AIT-5: Maskless, High-NA, Immersion, EUV,       and Imprint
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M_AIT_6.pdf
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 xiii) AIT-6
  

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Simulation of Semiconductor Lithography and Topography
 
PDF
Audio
 
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i) Table of Contents
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pdf
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ii) Cover
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iii) Color Plates
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 iv) Chapter 1: Introduction
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 v) Chapter 2: Visualizing Device Structure From Layout and      Process Flow
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 vi) Chapter 3: Topography Effects in Deposition and Etching
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 vii) Chapter 4: Characterization of Deposition and Etching
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 viii) Chapter 5: The Lithography Process and Basic        Simulation Models
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 viiii) Chapter 6: Model Based Characterization of Optical         Projection Printing
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 x) Chapter 7: Electron-Beam, X-Ray and Ion-Beam      Lithography

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