Set of Educational Applications

<Lithography>

Basic Projection Lithography

Depth of Focus

Resist Profile (SAMPLE)

Resist Dissolution Simulation

Basic Aberration Effects in Projection Printing

Alternating Phase Shift Mask

Strehl Ratio

Chemically-Amplified Resist Profile Sharpening

2-Dimensional Chemically Amplified Resist System

<Deposition and Etching>

Deposition and Metalization

Etching and Pattern Transfer